Home > Capability > Equipment > SEMS


FEI Nova NanoSEM 630

  • Schottky field emitter with up to 100 nA
  • 150 mm x 150 mm piezo driven stage
  • substrates up to 200mm can be loaded
  • ultra high resolution imaging under high and low vacuum
  • High vacuum 1.0 nm @ 15kV and Low Vacuum 1.8 nm @ 3kV
  • Non conducting substrates can be imaged without coatings
  • Electrostatic beam blanker and ebl capability
  • Several detectors including TLD, ETD, Helix, VCD, GAD
  • Integrated CCD in chamber camera

Hitachi S900

  • Cold cathode field emission electron source
  • 0.7 nm image resolution at 30 keV and 3 nm at 1 keV
  • Magnification from x100 to x800,000
  • TEM sample stage allowing W = 5 mm x L = 10 mm x H = 2.5 mm samples
  • Turbo pumped column and substrate chambers
  • Secondary electron and backscatter detectors

Hitachi S4700

  • Field emission electron source
  • 1.5 nm image resolution at 15 keV
  • Substrates up to 150 mm diameter
  • Accelerating voltages from 0.5 to 30 keV in 100 eV steps
  • Eucentric 5 axis motorised stage
  • Turbomolecular pumped column and sample chamber
  • High resolution back scattered detector
  • CD measurement and EDX analysis tools

Hitachi S3000

  • Pre -centred tungsten hairpin filament
  • 3.5 nm image resolution at 25keV
  • Substrates up to 150 mm diameter
  • Accelerating voltage 0.3 to 30 keV
  • 5 axis manual stage operation
  • Diffusion pumped column and sample chamber

Transmission Electron Microscopes (TEMs)

We have a long standing collaborations with the School of Physics and Astronomy who have a range of TEM tools including EELS and EDX capability as well as a dual beam SEM / focussed-ion beam system for sample cross sectioning and preparation. Commercial access to the facility is available through the Kelvin Nanocharacterisation Centre.