James Watt Nanofabrication Centre

The smallest electron beam lithography pattern of 3 nm

D.R.S. Cumming et al. "Fabrication of 3 nm wires using 100 keV electron beam lithography and poly(methyl methacrylate) resist" 68, 322 (1996): doi:10.1063/1.116073

The smallest edition of the Complete Works of Robert Burns

S. Thoms, This work was undertaken to demonstrate to the public the nanofabrication capability at Glasgow using electron beam lithography. The complete works is only 0.3 x 0.3 mm in size with 25 nm pixels (0.001 font size) and took only 5 minutes to write.

The highest accuracy layer-to-layer alignment of 0.46 nm rms

K.E. Docherty et al. "Improvements to the alignment process in a commercial vector scan electron beam lithography tool" Microelec. Eng. 85, 761 (2008): doi:10.1016/j.mee.2008.01.081

The smallest InP microring laser operating at 300 K

S. Furst et al. "Modal structure, directional and wavelength jumps of integrated semiconductor ring lasers: Experiment and theory" Appl. Phys. Lett. 93, 251109 (2008): doi:10.1063/1.3052601

The highest frequency mode locked solid state laser at 2.1 THz

D.A. Yanson et al. "Ultrafast harmonic mode-locking of monolithic compound-cavity laser diodes incorporating photonic-bandgap reflectors" IEEE J. Quantum Elec. 38, 1 (2002): doi:10.1109/3.973313

Highest Q Silicon Microcavities with Q = 177,000

A.R.M. Zain et al. "Ultra high quality factor 1D photonic crystal/photonic wire micro-cavities in silicon-on-insulator (SOI)" Opt. Exp. 16, 12084 (2008): doi:10.1364/OE.16.012084

This record was lost in 2010.

The Lowest Loss Silicon Waveguides (loss < 0.9 dB/cm)

M. Gnan et al. "Fabrication of low loss photonic wires in silicon-on-insulator using hydrogen silsesquioxane electron-beam resist" Elec. Lett. 44, 115 (2008): doi:10.1049/el:20082985

Highest performance HEMT

K. Elgaid et al. "50 nm T-gate metamorphic GaAs HEMTs with f_T of 440 GHz and noise figure of 0.7 dB at 26 GHz" IEEE Elec. Dev. Lett. 26, 784 (2005): doi:10.1109/LED.2005.857716

This record was lost to a US company in 2008.

The smallest T-gate transistor of 10 nm

S. Bentley et al. "Two methods for realising 10 nm T-gate lithography" Microelec. Eng. 86, 1067 (2009): doi:10.1016/j.mee.2008.12.029

The smallest gate-length diamond transistor of 50 nm

D.A.J. Moran et al. "Processing of 50 nm gate-length hydrogen terminated diamond FETs for high frequency and high power applications" Microelec. Eng. 8, 1067 (2009): doi:10.1016/j.mee.2010.11.029

The first tunable terahertz filter

T.D. Drysdale et al. "Transmittance of a tunable filter at terahertz frequencies" Appl. Phys. Lett. 85, 5173 (2004): doi:10.1063/1.1829798