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Glasgow holds a number of world records, world bests and world firsts for devices and technology fabricated in the James Watt Nanofabrication Centre as listed below:

2.5 nm line

2.5 nm Isolated HSQ Resist Lines Written by Electron Beam Lithography

D.S. MacIntyre and S. Thoms "Comparison of hydrogen silsesquioxane development methods for sub-10 nm electron beam lithography using accurate linewidth inspection" J. Vac. Sci. Technol. B 29, 06F307 (2011): doi:10.1116/1.3634020

STEM cells

First Directed STEM Cell Growth

M.J. Dalby et al. "The control of human mesenchymal cell differentiation using nanoscale symmetry and disorder" Nature Materials 6, 997 (2007): doi:10.1038/nmat2013

3 nm wire

The smallest electron beam lithography pattern of 3 nm

D.R.S. Cumming et al. "Fabrication of 3 nm wires using 100 keV electron beam lithography and poly(methyl methacrylate) resist" 68, 322 (1996): doi:10.1063/1.116073


The smallest edition of the Complete Works of Robert Burns

S. Thoms, This work was undertaken to demonstrate to the public the nanofabrication capability at Glasgow using electron beam lithography. The complete works is only 0.3 x 0.3 mm in size with 25 nm pixels (0.001 font size) and took only 5 minutes to write.


The highest accuracy layer-to-layer alignment of 0.46 nm rms

K.E. Docherty et al. "Improvements to the alignment process in a commercial vector scan electron beam lithography tool" Microelec. Eng. 85, 761 (2008): doi:10.1016/j.mee.2008.01.081

Microring Laser

The smallest InP microring laser operating at 300 K

S. Furst et al. "Modal structure, directional and wavelength jumps of integrated semiconductor ring lasers: Experiment and theory" Appl. Phys. Lett. 93, 251109 (2008): doi:10.1063/1.3052601

THz Mode Locked Laser

The highest frequency mode locked solid state laser at 2.1 THz

D.A. Yanson et al. "Ultrafast harmonic mode-locking of monolithic compound-cavity laser diodes incorporating photonic-bandgap reflectors" IEEE J. Quantum Elec. 38, 1 (2002): doi:10.1109/3.973313

Silicon High-Q Cavity

Highest Q Silicon Microcavities with Q = 177,000

A.R.M. Zain et al. "Ultra high quality factor 1D photonic crystal/photonic wire micro-cavities in silicon-on-insulator (SOI)" Opt. Exp. 16, 12084 (2008): doi:10.1364/OE.16.012084

This record was lost in 2010.

Silicon waveguide

The Lowest Loss Silicon Waveguides (loss < 0.9 dB/cm)

M. Gnan et al. "Fabrication of low loss photonic wires in silicon-on-insulator using hydrogen silsesquioxane electron-beam resist" Elec. Lett. 44, 115 (2008): doi:10.1049/el:20082985

T-gate HEMT

Highest performance HEMT

K. Elgaid et al. "50 nm T-gate metamorphic GaAs HEMTs with fT of 440 GHz and noise figure of 0.7 dB at 26 GHz" IEEE Elec. Dev. Lett. 26, 784 (2005): doi:10.1109/LED.2005.857716

This record was lost to a US company in 2008.

T-gate HEMT

The smallest T-gate transistor of 10 nm

S. Bentley et al. "Two methods for realising 10 nm T-gate lithography" Microelec. Eng. 86, 1067 (2009): doi:10.1016/j.mee.2008.12.029


The smallest gate-length diamond transistor of 50 nm

D.A.J. Moran et al. "Processing of 50 nm gate-length hydrogen terminated diamond FETs for high frequency and high power applications" Microelec. Eng. 8, 1067 (2009): doi:10.1016/j.mee.2010.11.029

THz filter

The first tunable terahertz filter

T.D. Drysdale et al. "Transmittance of a tunable filter at terahertz frequencies" Appl. Phys. Lett. 85, 5173 (2004): doi:10.1063/1.1829798