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Suss Microtec MA6

  • Maximum substrate size of 150 mm
  • For samples below 75 mm: hard and vacuum contact modes
  • For samples of 100 mm and above: proximity, hard and vacuum contact modes
  • Top and back side alignment
  • 350 W Hg lamp
  • UV400 optics and i-line filters
  • Motorised stage and focus
  • Exposure controller for single or multiple exposures
  • Chucks for bond alignment and silicon fusion applications