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Veeco Dektak 6M Height Profiler
- Substrates up to 150 mm diameter
- Vertical resolution 0.1 nm at 6.5 k(nm) range
- Stylus force from 1 mg to 15 mg
- Stylus tip radius of 12.5 µm and 2.5 µm
- Z height capability of 1 mm
- x-y stage translation of 20 mm x 80 mm
- Up to 30,000 data points per scan
Veeco Dimension 3100 Atomic Force Microscope (AFM)
- Substrates up to 150 mm diameter and 12 mm thick
- Z-range of 6 µm
- x-y imaging area of 90 µm
- Thermal AFM temperature measurement capability
Optical Microscopes
Optical microscopy typically has resolving power to about 0.2 µm and is used extensively in micro and nanofabrication. In the JWNC we use several different types of optical microscopy including light field, dark field and Normaski. Microscopes used include a Leica NM20 and a Zeiss Axiotron with image capture facilities.