Home > Capability > Equipment > Metrology

Contour

Bruker Contour GT-X 3D Optical Microscope

  • Substrates up to 200 mm diameter
  • Vertical resolution 0.05 nm
  • Vertical measurement range up to 10 mm
  • Step height repeatability < 0.1%
  • Built in self-calibration
Dektak2

Bruker Dektak XT Height Profiler

  • Substrates over 200 mm diameter
  • Vertical resolution 0.01 nm on 6500 nm range
  • Stylus force from 1 mg to 15 mg
  • Stylus tip radius of 50 nm and 25 µm
  • Z height capability of 1 mm
  • 1D or 2D scans for 3D mapping
  • 2D stress measurements
Dektak

Veeco Dektak 6M Height Profiler

  • Substrates up to 150 mm diameter
  • Vertical resolution 0.1 nm at 6.5 k(nm) range
  • Stylus force from 1 mg to 15 mg
  • Stylus tip radius of 12.5 µm and 2.5 µm
  • Z height capability of 1 mm
  • x-y stage translation of 20 mm x 80 mm
  • Up to 30,000 data points per scan
AFM

Bruker Dimension Icon Atomic Force Microscope (AFM)

  • Substrates up to 210 mm diameter and 15 mm thick
  • Z-range of 10 µm
  • Drift rate < 0.2 nm/minute
  • Vertical noise < 30 pm
  • x-y imaging area of 90 µm x 90 µm
  • PeakForce TUNA nanoelectrical mapping
AFM

Veeco Dimension 3100 Atomic Force Microscope (AFM)

  • Substrates up to 150 mm diameter and 12 mm thick
  • Z-range of 6 µm
  • x-y imaging area of 90 µm
  • Thermal AFM temperature measurement capability
Raman

WiTec Confocal MicroRaman and AFM

  • < 300 nm FWHM resolution at 532 nm excitation
  • 532 nm, 785 nm and 1064 nm lasers with spectrometers
  • Photoluminescence InGaAs detector for 1 µm to 2.2 µm wavelengths
  • Raman mapping with Andor EMCCD camera: 0.76 ms per spectra
Ellipsometer

J A Woollam Mark II Variabel Angle Spectroscopic Ellipsometer

  • 1.7 to 33 µm wavelengths
  • Measures thickness plus n and k
Optical Microscopes

Optical Microscopes

Optical microscopy typically has resolving power to about 0.2 µm and is used extensively in micro and nanofabrication. In the JWNC we use several different types of optical microscopy including light field, dark field and Normaski. Microscopes used include a Leica NM20 and a Zeiss Axiotron with image capture facilities.