Home > Capability > MicroElectroMechanical Systems (MEMS)

The University of Glasgow has 30 years experience of microfabrication and nanofabrication and is one of the few places in the world that can undertake sub-10 nm electron beam lithography across substrates with dimensions up to 200 mm along with optical lithography. Our experience also enables fully integrated devices and circuits along with 3D patterned at the micro and nanoscales.

Most of the research is undertaken by the Micro and Nanotechnology Group and the Biomedical Engineering Research Groups - School of Engineering.

The research was undertaken as part of the former Electronics and Electrical Engineering Department at Glasgow.

Microfluidics

Microfluidics

M. Zagnoni and J.M. Cooper "On-chip electrocoalescence of microdroplets as a function of voltage, frequency and droplet size" Lab on a Chip 28, 2652 (2009): doi:10.1039/b906298j

THz filter

Tunable Terahertz Filters

T.D. Drysdale et al. "Transmittance of a tunable filter at terahertz frequencies" Appl. Phys. Lett. 85, 5173 (2004): doi:10.1063/1.1829798

Fresnel lens

Terahertz Fresnel Lenses

S. Wang et al. "Characterization of T-ray binary lenses" Optics Letters 27, 1183 (2002): doi:10.1364/OL.27.001183

Fresnel lens

Terahertz Imprinted Polypropylene Fresnel Lenses

E.D. Walsby et al. "Imprinted diffractive optics for terahertz radiation" Opt. Lett. 32, 1141 (2007): doi:10.1364/OL.32.001141

Gunn diode

Planar Gunn Diodes

A. Khalid et al. "A Planar Gunn Diode Operating Above 100 GHz" IEEE Elec. Dev. Lett. 28, 849 (2007): doi:10.1109/LED.2007.904218

Waveplate

Imprinted Terahertz Quarter Wave Plate

S. Saha et al. "Imprinted terahertz artificial dielectric quarter wave plates" Opt. Exp. 18, 12168 (2010): doi:10.1364/OE.18.012168

Beamsteerer

mm-wave Beam Steering Device

T.D. Drysdale et al. "Measured and simulated performance of a ceramic micromechanical beam steering device at 94 GHz" Appl. Opt. 47, 2382 (2008): doi:10.1364/AO.47.002382

Resonator

Terahertz Dual-band Resonator

Y. Ma et al. "Terahertz dual-band resonator on silicon" Optics Letters 35, 469 (2010): doi:10.1364/OL.35.000469

SiGe QCL

Si/SiGe Terahertz Superlattice LEDs

G. Matmon et al. "Si/SiGe quantum cascade superlattice designs for terahertz emission" J. Appl. Phys. 107, 053109 (2010): doi:10.1063/1.3319653

CPW

Elevated Coplanar Waveguides

F. Aghamoradi et al. "Performance enhancement of millimetre-wave resonators using elevated CPW" Elec. Lett. 45, 1326 (2009): doi:10.1049/el.2009.2348

AFM

Thermal AFM tips

J.P. Edgeworth et al. "Growth and morphology control of carbon nanotubes at the apexes of pyramidal silicon tips" Nanotechnology 21, 105605 (2010): doi:10.1088/0957-4484/21/10/105605