There is an electrical probe station with Agilent Semiconductor Parameter Analyser inside the JWNC cleanroom. Outside the cleanroom, there is also a singificant amount of electrical characterisation tools as described below including full S-parameter test with on-wafer calibration and de-embedding capability and experience.
Commercial access to all these facilities is undertaken by Kelvin Nanotechnology.
Cascade Microtech M150 (up to 150 mm substrate capability) with Agilent PNA Series Network Analyser, mm-lead controller and OML Inc. VNA extenders.
Cascade Microtech M150 (up to 150 mm substrate capability) with Agilent PNA Series Network Analyser, mm-lead controller and OML Inc. VNA extenders.
Cascade Microtech Microchamber (up to 150 mm substrate capability) with Agilent PNA Series Network Analyser, mm-lead controller and Agilent VNA extenders. 100 kHz to 20 GHz Agilent analogue signal generators and oscilloscopes are available.
The Cascade Microtech Microchamber (up to 150 mm substrate capability) also has an Agilent B1500A Semiconductor Parameter Test system with integrated CV test card and variable duty-cycle pulsed measurement capability down to 10 ns. There are also 3 older HP Semiconductor Parameter Analysers with a range of probe stations for dc characterisation.
Glasgow has an anechioc chamber in a fully screened room with near field test capability from kHz up to 20 GHz.
Two vacuum Bruker 66 vs Fourier Transfor Infra Red (FTIR) spectroscopy systems with a QMC liquid He cooled Si-bolometer and beam splitters that allow power measurements, polarisation and spectra to be obtained between 60 GHz and 18 THz (about 16 µm).