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The JWNC clean room has an area of 750 m2 spread over 2 floors which allows a large range of nanofabrication activities to take place whilst minimising any cross contamination. The high resolution electron beam lithography and SEM tools are on the bottom floor on special vibration isolation floors that are required for sub-10 nm nanofabrication. The rooms range from class 10,000 down to class 10 with the majority of rooms being class 1,000. The electron beam lithography suite has temperature control of 0.1 oC to enable sub-10 nm lithography.

Clean Room Top Floor


Clean Room Bottom Floor